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1. (WO2017195244) LASER DEVICE

Pub. No.:    WO/2017/195244    International Application No.:    PCT/JP2016/063716
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Tue May 10 01:59:59 CEST 2016
IPC: H01S 3/036
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: ASAYAMA Takeshi
浅山 武志
Title: LASER DEVICE
Abstract:
A control unit for this laser device selects one among a first gas control and a second gas control on the basis of gas pressure measured using a pressure sensor. In the first gas control, at least one among a first laser gas and a second laser gas is supplied to a chamber and the gas pressure in the chamber after the first gas control is increased in comparison to the gas pressure in the chamber before the first gas control. In the second gas control, at least the first laser gas is supplied to the chamber, some of the laser gas in the chamber is discharged, and the difference between the gas pressure in the chamber before the second gas control and the gas pressure in the chamber after the second gas control is set smaller than the difference between the gas pressure in the chamber before the first gas control and the gas pressure in the chamber after the first gas control.