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1. (WO2017194832) AN ARTIFACT FOR DETERMINING RESOLUTION OF IMAGING BASED ON ELECTROMAGNETIC RADIATION AND/OR MECHANICAL WAVES

Pub. No.:    WO/2017/194832    International Application No.:    PCT/FI2017/050353
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Tue May 09 01:59:59 CEST 2017
IPC: G01B 9/02
G01B 21/04
G01B 11/06
Applicants: ÅBO AKADEMI (ÅBO AKADEMI UNIVERSITY)
HELSINGIN YLIOPISTO
Inventors: HÆGGSTRÖM, Edward
KASSAMAKOV, Ivan
NOLVI, Anton
SANDLER, Niklas
VIITALA, Tapani
NYMAN, Johan
Title: AN ARTIFACT FOR DETERMINING RESOLUTION OF IMAGING BASED ON ELECTROMAGNETIC RADIATION AND/OR MECHANICAL WAVES
Abstract:
An artifact (101) for determining resolution of imaging based on electromagnetic radiation, mechanical waves, or both is presented. The artifact comprises a substrate (102) and layers (103, 104) on top of the substrate. The layers comprise organic material and are stacked on each other in a partially overlapping way so that an edge (107) of a first one of the layers is arranged to intersect with an edge (108) of a second one of the layers. The layers constitute a three-dimensional surface topography where a groove (111) defined by the edges of the first and second ones of the layers is tapering towards a point of intersection (112) between the edges. The resolution is a minimum width of the tapering groove which is revealed by the imaging so that a pre-determined criterion is fulfilled.