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1. (WO2017194098) METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS

Pub. No.:    WO/2017/194098    International Application No.:    PCT/EP2016/060440
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Wed May 11 01:59:59 CEST 2016
IPC: C23C 14/12
C23C 14/24
C23C 14/04
C23C 16/44
C23C 16/455
C23C 14/56
H01L 51/56
Applicants: APPLIED MATERIALS, INC.
DIEGUEZ-CAMPO, Jose Manuel
BANGERT, Stefan
LOPP, Andreas
WURSTER, Harald
HAAS, Dieter
Inventors: DIEGUEZ-CAMPO, Jose Manuel
BANGERT, Stefan
LOPP, Andreas
WURSTER, Harald
HAAS, Dieter
Title: METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS
Abstract:
A method of operating a deposition apparatus is provided. The method comprises: Deposition of an evaporated source material on a substrate (10) by guiding the evaporated source material from one or more outlets (22) of an evaporation source (20) toward the substrate (10), wherein part of the evaporated source material is blocked by and attaches to a shielding device (30) arranged between the one or more outlets (22) and the substrate (10), followed by a cleaning of the shielding device (30) by at least locally heating the shielding device (30) for releasing at least part of the attached source material from the shielding device (30). According to a further aspect, a deposition apparatus is provided that can be operated according to the described methods.