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1. (WO2017193788) BUFFER DEVICE AND RUBBER COATING DEVELOPER EQUIPPED WITH SAME

Pub. No.:    WO/2017/193788    International Application No.:    PCT/CN2017/081243
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Fri Apr 21 01:59:59 CEST 2017
IPC: G03F 7/16
H01L 21/673
B65G 49/07
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
重庆京东方光电科技有限公司
Inventors: WANG, Zhichao
汪直超
SONG, Xiangyu
宋翔宇
GUAN, Yongbing
关永兵
LIU, Bingqiang
刘丙强
CAO, Kun
曹坤
Title: BUFFER DEVICE AND RUBBER COATING DEVELOPER EQUIPPED WITH SAME
Abstract:
A buffer device and a rubber coating developer equipped with same. The buffer device comprises a frame (1) and multiple layers of support plates (2) sequentially disposed in the frame (1) along a height direction of the frame (1). The support plates (2) are used for receiving substrates to be exposed. The frame (1) is provided with multiple layers of support components (3) respectively associated with the multiple layers of support plates (2). Each layer of support plate (2) is slidably mounted on the support components (3). The buffer device shortens the time of servicing and maintenance, and improves the working efficiency and the utilization rate of an apparatus.