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1. (WO2017192908) SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS IN A FABRICATED TARGET COMPONENT USING CONSISTENT MODULATION FOR THE TARGET AND REFERENCE COMPONENTS

Pub. No.:    WO/2017/192908    International Application No.:    PCT/US2017/031147
Publication Date: Fri Nov 10 00:59:59 CET 2017 International Filing Date: Fri May 05 01:59:59 CEST 2017
IPC: H01L 21/66
Applicants: KLA-TENCOR CORPORATION
Inventors: PARK, Allen
PLIHAL, Martin
Title: SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS IN A FABRICATED TARGET COMPONENT USING CONSISTENT MODULATION FOR THE TARGET AND REFERENCE COMPONENTS
Abstract:
A fabricated device having consistent modulation between target and reference components is provided. The fabricated device includes a target component having a first modulation. The fabricated device further includes at least two reference components for the target component including a first reference component and a second reference component, where the first reference component and the second reference component each have the first modulation. Further, a system, method, and computer program product are provided for detecting defects in a fabricated target component using consistent modulation for the target and reference components.