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1. (WO2017192622) PROTECTIVE METAL OXY-FLUORIDE COATINGS

Pub. No.:    WO/2017/192622    International Application No.:    PCT/US2017/030690
Publication Date: Fri Nov 10 00:59:59 CET 2017 International Filing Date: Wed May 03 01:59:59 CEST 2017
IPC: H01L 21/56
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: FENWICK, David
LEE, Chengtsin
SUN, Jennifer Y.
CHEN, Yikai
Title: PROTECTIVE METAL OXY-FLUORIDE COATINGS
Abstract:
An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.