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|1. (WO2017191829) METHOD FOR STARTING ULTRAPURE WATER PRODUCTION APPARATUS|
|Applicants:||NOMURA MICRO SCIENCE CO., LTD.
|Title:||METHOD FOR STARTING ULTRAPURE WATER PRODUCTION APPARATUS|
Provided is a method for starting an ultrapure water production apparatus (1) whereby the phenomenon of hunting for a fine particle count after the start of ultrapure water production can be suppressed and ultrapure water having an extremely low concentration of fine particles can be stably obtained. A method for starting an ultrapure water production apparatus (1), comprising cleaning an inside system of the ultrapure water production apparatus (1) prior to supplying of ultrapure water to a usage location in an ultrapure water production apparatus (1) for processing primary pure water to produce ultrapure water and supplying the ultrapure water to the usage location, wherein pure water containing hydrogen peroxide or a gas is caused to accumulate in or flow through a flow channel of the ultrapure water production apparatus (1), vibration is imparted from the outside to at least a portion of the flow channel, and fine particles adhering to an inside surface of the flow channel are removed.