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1. (WO2017191829) METHOD FOR STARTING ULTRAPURE WATER PRODUCTION APPARATUS

Pub. No.:    WO/2017/191829    International Application No.:    PCT/JP2017/017139
Publication Date: Fri Nov 10 00:59:59 CET 2017 International Filing Date: Tue May 02 01:59:59 CEST 2017
IPC: B08B 9/032
B01D 61/14
B08B 3/08
B08B 3/10
B08B 3/12
B08B 7/02
C02F 1/44
Applicants: NOMURA MICRO SCIENCE CO., LTD.
野村マイクロ・サイエンス株式会社
Inventors: AMAMIYA Shinichiro
雨宮 晋一郎
SAKAI Naoya
坂井 直弥
SUZUKI Norihiko
鈴木 規彦
ABE Toshikazu
阿部 俊和
Title: METHOD FOR STARTING ULTRAPURE WATER PRODUCTION APPARATUS
Abstract:
Provided is a method for starting an ultrapure water production apparatus (1) whereby the phenomenon of hunting for a fine particle count after the start of ultrapure water production can be suppressed and ultrapure water having an extremely low concentration of fine particles can be stably obtained. A method for starting an ultrapure water production apparatus (1), comprising cleaning an inside system of the ultrapure water production apparatus (1) prior to supplying of ultrapure water to a usage location in an ultrapure water production apparatus (1) for processing primary pure water to produce ultrapure water and supplying the ultrapure water to the usage location, wherein pure water containing hydrogen peroxide or a gas is caused to accumulate in or flow through a flow channel of the ultrapure water production apparatus (1), vibration is imparted from the outside to at least a portion of the flow channel, and fine particles adhering to an inside surface of the flow channel are removed.