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1. (WO2017191796) THIN-FILM PRODUCTION DEVICE, AND THIN-FILM PRODUCTION METHOD

Pub. No.:    WO/2017/191796    International Application No.:    PCT/JP2017/016584
Publication Date: Fri Nov 10 00:59:59 CET 2017 International Filing Date: Thu Apr 27 01:59:59 CEST 2017
IPC: C23C 14/24
C23C 14/34
Applicants: ULVAC, INC.
株式会社アルバック
Inventors: KIMURA Tooru
木村 孔
Title: THIN-FILM PRODUCTION DEVICE, AND THIN-FILM PRODUCTION METHOD
Abstract:
Provided is art that enables the long-term use of a film thickness sensor. Fine particles of a film formation material 37 are emitted from a film formation source 12 so as to grow a thin film on a film formation object 15 and a film thickness sensor 31, a measured growth rate of the thin film is obtained by the film thickness sensor 31, the measured growth rate and a preset reference rate are compared, and when electric power is varied such that the measured growth rate approaches the reference rate, a shutter 35 between the film thickness sensor 31 and an emitting part 38 is opened and closed, thus shortening the time for the fine particles to reach the film thickness sensor 31. The film thickness of the thin film grown on the film thickness sensor 31 is less than when the shutter 35 is not opened and closed, thus lengthening the service life of the film thickness sensor 31.