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1. (WO2017191634) A METHOD AND SYSTEM FOR DETERMINING VOIDS IN A BUMP OR SIMILAR OBJECT

Pub. No.:    WO/2017/191634    International Application No.:    PCT/IL2017/050487
Publication Date: Fri Nov 10 00:59:59 CET 2017 International Filing Date: Wed May 03 01:59:59 CEST 2017
IPC: G01N 23/223
G01N 21/00
Applicants: XWINSYS LTD
Inventors: GEFFEN, Michael
REINIS, Doron
SMITH, Colin
PERETZ, Roni
Title: A METHOD AND SYSTEM FOR DETERMINING VOIDS IN A BUMP OR SIMILAR OBJECT
Abstract:
A method and a system for a bump's inspection are disclosed. The inspection is done by comparing the geometrical volume contained in the bump's outside contour and the volume of the solid materials (atomic volume) from which the bump is made and/or analyzing the bump's solid materials ratio. Principally, the inspection is done by preparing an empirical reference table of the emitted energy received from the solid materials, from which a reference bump with a given volume is comprised, using EDXRF (Energy-Dispersive-X-ray-Fluorescence) analysis; obtaining a geometrical volume of the bump using a 3D image-processing method; adapting the reference table according to the difference between the atomic volume and the geometrical volume of the bump; The difference between atomic volume and geometrical volume are used to inspect the bump and to determine the presence and volume of voids within the bump. Similar techniques can also be employed in connection with the determination of, for example, the thickness dimensions of a multi-layered stacked array of metals, the depth dimensions of relevant features, and surface uniformity or irregularity.