Search International and National Patent Collections

1. (WO2017189135) CHEMICAL DELIVERY CHAMBER FOR SELF-ASSEMBLED MONOLAYER PROCESSES

Pub. No.:    WO/2017/189135    International Application No.:    PCT/US2017/024077
Publication Date: Fri Nov 03 00:59:59 CET 2017 International Filing Date: Sat Mar 25 00:59:59 CET 2017
IPC: H01L 21/67
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: LIANG, Qiwei
KHAN, Adib
KAUFMAN-OSBORN, Tobin
NEMANI, Srinivas D.
GODET, Ludovic
Title: CHEMICAL DELIVERY CHAMBER FOR SELF-ASSEMBLED MONOLAYER PROCESSES
Abstract:
Implementations described herein relate to apparatus and methods for self-assembled monolayer (SAM) deposition. Apparatus described herein includes processing chambers having various vapor phase delivery apparatus fluidly coupled thereto. SAM precursors may be delivered to process volumes of the chambers via various apparatus which is heated to maintain the precursors in vapor phase. In one implementation, a first ampoule or vaporizer configured to deliver a SAM precursor may be fluidly coupled to the process volume of a process chamber. A second ampoule or vaporizer configured to deliver a material different from the SAM precursor may also be fluidly coupled to the process volume of the process chamber.