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1. (WO2017187768) ELASTIC WAVE DEVICE AND MANUFACTURING METHOD FOR SAME

Pub. No.:    WO/2017/187768    International Application No.:    PCT/JP2017/007829
Publication Date: Fri Nov 03 00:59:59 CET 2017 International Filing Date: Wed Mar 01 00:59:59 CET 2017
IPC: H03H 9/145
H03H 3/08
H03H 9/25
H03H 9/64
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: KAWASAKI, Kentaro
川▲崎▼ 健太郎
Title: ELASTIC WAVE DEVICE AND MANUFACTURING METHOD FOR SAME
Abstract:
Provided is an elastic wave device with which productivity can be increased and insertion loss can be decreased. An elastic wave device 1 comprises: a piezoelectric substrate 2; first to third IDT electrodes 4A-4C which are provided on the piezoelectric substrate 2; and a dielectric film 5 which is provided on the piezoelectric substrate 2 so as to cover the first to third IDT electrodes 4A-4C, and in which the thickness of a first region A covering the first IDT electrode 4A is different from the thickness of second and third regions B, C covering the second and third IDT electrodes 4B, 4C. First to third elastic wave filters 3A-3C (first to third elastic wave elements), which include the first to third IDT electrodes 4A-4C and the dielectric film 5, are formed. When the thickness calculated assuming that the densities of the materials constituting the first to third IDT electrodes 4A-4C are all the same density is regarded as the density-converted thickness, the density-converted thicknesses of the first and second IDT electrodes 4A, 4B are the same, and the density-converted thickness of the third IDT electrode 4C is different from the density-converted thicknesses of the first and second IDT electrodes 4A, 4B.