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1. (WO2017187016) APPARATUS ASSOCIATED WITH ANALYSIS OF THIN FILM LAYER AND MANUFACTURING METHOD THEREOF
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/187016 International Application No.: PCT/FI2017/050312
Publication Date: 02.11.2017 International Filing Date: 25.04.2017
IPC:
G01B 21/00 (2006.01) ,C23C 14/00 (2006.01) ,C23C 16/00 (2006.01)
Applicants: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY[FI/FI]; Vuorimiehentie 3 02150 Espoo, FI
Inventors: PUURUNEN, Riikka; FI
GAO, Feng; FI
Agent: KOLSTER OY AB; (Salmisaarenaukio 1) P.O.Box 204 00181 Helsinki, FI
Priority Data:
2016536126.04.2016FI
Title (EN) APPARATUS ASSOCIATED WITH ANALYSIS OF THIN FILM LAYER AND MANUFACTURING METHOD THEREOF
(FR) APPAREIL ASSOCIÉ À L'ANALYSE DE COUCHE DE FILM MINCE ET SON PROCÉDÉ DE FABRICATION
Abstract: front page image
(EN) An apparatus associated with an analysis of a thin film layer comprises two layer structures (100, 102) with a cavity (104) therebetween, and an opening (110) through one of the layer structures (102) to the cavity (104), the cavity (104) being configured to receive, through the opening (110), material used to form a thin film layer (900) inside the cavity (104). At least one of the two layer structures (100, 102) comprises at least one positional indicator (108) for an analysis associated with the thin film layer (900).
(FR) L'invention concerne un appareil associé à une analyse d'une couche de film mince qui comprend deux structures de couche (100, 102) ayant une cavité (104) entre elles, et une ouverture (110) à travers l'une des structures de couche (102) vers la cavité (104), la cavité (104) étant configurée pour recevoir, à travers l'ouverture (110), un matériau utilisé pour former une couche de film mince (900) à l'intérieur de la cavité (104). Au moins une des deux structures de couche (100, 102) comprend au moins un indicateur de position (108) pour une analyse associée à la couche de film mince (900).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)