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1. (WO2017186804) HIGH PRECISION COMPUTED TOMOGRAPHY FOR METROLOGY

Pub. No.:    WO/2017/186804    International Application No.:    PCT/EP2017/059954
Publication Date: Fri Nov 03 00:59:59 CET 2017 International Filing Date: Thu Apr 27 01:59:59 CEST 2017
IPC: G01N 23/04
Applicants: DANMARKS TEKNISKE UNIVERSITET
Inventors: GUNDLACH, Carsten
POULSEN, Henning Friis
Title: HIGH PRECISION COMPUTED TOMOGRAPHY FOR METROLOGY
Abstract:
Disclosed is a CT system for performing measurements on an object. The CT system comprises a support element for supporting the object; a radiation source for radiating the object at a plurality of different angles; a radiation detector assembly for detecting radiation passed through the object and in response thereto generate radiation data; and a processing unit operatively connected to the radiation detector assembly. The radiation detector assembly comprises a support, a first detector array, and a second detector array, the first detector array and the second detector array being attached to the support. The processing is configured to generate tomographic images of the object by processing radiation data received from the radiation detector assembly together with first calibration data describing properties of the first detector array and second calibration data describing properties of the second detector array.