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1. WO2017186166 - WAFER BOX CONVEYOR

Publication Number WO/2017/186166
Publication Date 02.11.2017
International Application No. PCT/CN2017/082408
International Filing Date 28.04.2017
IPC
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
G01S 15/931
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
15Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
88Sonar systems specially adapted for specific applications
93for anti-collision purposes
931of land vehicles
H01L 21/67259
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67259Position monitoring, e.g. misposition detection or presence detection
H01L 21/67294
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67294using identification means, e.g. labels on substrates or labels on containers
H01L 21/67706
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67706Mechanical details, e.g. roller, belt
H01L 21/67724
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67724by means of a cart or a vehicule
H01L 21/6773
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
6773Conveying cassettes, containers or carriers
Applicants
  • 上海微电子装备(集团)股份有限公司 SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD. [CN]/[CN]
Inventors
  • 李玲雨 LI, Lingyu
  • 许琦欣 XU, Qixin
Agents
  • 上海思微知识产权代理事务所(普通合伙) SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY
Priority Data
201610285760.029.04.2016CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) WAFER BOX CONVEYOR
(FR) TRANSPORTEUR DE BOÎTES À PLAQUETTES
(ZH) 一种片盒运输装置
Abstract
(EN)
Provided is a wafer box conveyor, comprising an intelligent vehicle, a bottom extension frame erected on the intelligent vehicle, and a wafer box bearing frame fixed onto the bottom extension frame. The wafer box bearing frame is divided into multiple layers, and each layer is equipped with a plurality of wafer box bearing plates. The wafer box bearing plate surface is provided with a first groove and a second groove disposed in the first groove. The first groove is used to bear a wafer box in a first gauge. The second groove is used to bear a wafer box in a second gauge. With the first groove and the second groove, the same wafer box bearing plate bearing the wafer boxes of two different gauges is achieved so that the wafer box conveyor is suitable for the transport of wafer boxes of two different gauges, thereby improving the yield of transport. In addition, by means of the transport of the intelligent vehicle, laying a rail system and manual work involved in the transport are unnecessary, and the transportation cost is reduced while the automatic transportation of the wafer boxes is achieved, thereby saving time and labour.
(FR)
L'invention porte sur un transporteur de boîtes à plaquettes, comprenant un véhicule intelligent, un châssis à extension inférieure érigé sur le véhicule intelligent, ainsi qu'un châssis de support de boîtes à plaquettes fixé sur le châssis à extension inférieure. Le châssis de support de boîtes à plaquettes est divisé en couches multiples et chaque couche est pourvue d'une pluralité de plaques de support de boîtes à plaquettes. La surface de plaque de support de boîtes à plaquettes comporte est une première rainure et une deuxième rainure formée dans la première. La première rainure sert à soutenir une boîte à plaquettes dans une première jauge. La deuxième rainure sert à soutenir une boîte à plaquettes dans une deuxième jauge. Avec la première et la deuxième rainure, la même plaque de support de boîtes à plaquettes soutient les boîtes à plaquettes de deux jauges différentes, de sorte que le transporteur de boîtes à plaquettes soit adapté au transport de boîtes à plaquettes de deux jauges différentes, ce qui améliore le rendement de transport. En outre, grâce au transport du véhicule intelligent, la pose d'un système de rails et le travail manuel impliqué dans le transport ne sont pas nécessaires. Ainsi, le coût de transport est réduit tandis que le transport automatique des boîtes à plaquettes est réalisé, ce qui permet de réaliser des économies de temps et de main d'oeuvre.
(ZH)
本发明提供了一种片盒运输装置,所述片盒运输装置包括智能小车、架设在所述智能小车上的底部扩展框架以及固定在所述底部扩展框架上的片盒承载框架,所述片盒承载框架被分隔为多层,每层设有多个片盒承载板;其中,所述片盒承载板表面设置有第一凹槽及设置于所述第一凹槽内的第二凹槽,所述第一凹槽用于承载第一规格的片盒,所述第二凹槽用于承载第二规格的片盒。通过第一凹槽和第二凹槽,实现同一片盒承载板承载两种不同规格的片盒,从而使得片盒运输装置适用两种不同规格的片盒的运输,提高了运输产率。此外,通过智能小车搬运,无需铺设系统轨道及人工参与运输,实现片盒的自动运输的同时降低了运输成本,省时省力。
Also published as
SG11201809548Y
Latest bibliographic data on file with the International Bureau