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1. (WO2017185069) SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION
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Pub. No.: WO/2017/185069 International Application No.: PCT/US2017/029006
Publication Date: 26.10.2017 International Filing Date: 21.04.2017
IPC:
B23B 25/06 (2006.01) ,B82Y 35/00 (2011.01) ,G01B 11/00 (2006.01) ,G01Q 10/00 (2010.01) ,G01Q 10/04 (2010.01)
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B
TURNING; BORING
25
Accessories or auxiliary equipment for turning-machines
06
Measuring, gauging, or adjusting equipment on turning-machines for setting-on, feeding, controlling, or monitoring the cutting tools or work
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
35
Methods or apparatus for measurement or analysis of nano-structures
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
10
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
10
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04
Fine scanning or positioning
Applicants:
MOLECULAR VISTA, INC. [US/US]; 6840 Via Del Oro Suite 110 San Jose, CA 95119, US
Inventors:
JUEDES, Kyle, C.; US
ALBRECHT, Thomas, R.; US
NOWAK, Derek; US
PARK, Sung; US
Agent:
HAM, Thomas, H.; US
Priority Data:
62/325,83221.04.2016US
Title (EN) SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION
(FR) SYSTÈME ET PROCÉDÉ DE CORRECTION DE DÉRIVE OPTIQUE
Abstract:
(EN) System and method for optical drift correction uses light from a light source that is reflected from a curved surface of a mirror and detected at photosensitive detectors to detect movements of the mirror with respect to the light source.
(FR) L'invention concerne un système et un procédé de correction de dérive optique utilisant la lumière provenant d'une source lumineuse, réfléchie par une surface incurvée d'un miroir et détectée par des capteurs photosensibles permettant de détecter des mouvements du miroir par rapport à la source de lumière.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)