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1. (WO2017183368) MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND IMAGE ACQUISITION DEVICE
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Pub. No.: WO/2017/183368 International Application No.: PCT/JP2017/010641
Publication Date: 26.10.2017 International Filing Date: 16.03.2017
IPC:
G02B 26/10 (2006.01) ,B81B 1/00 (2006.01) ,G02B 26/08 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
10
Scanning systems
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
1
Devices without movable or flexible elements, e.g. micro-capillary devices
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
Applicants: HAMAMATSU PHOTONICS K.K.[JP/JP]; 1126-1, Ichino-cho, Higashi-ku, Hamamatsu-shi, Shizuoka 4358558, JP
Inventors: TAKAHASHI Akira; JP
Agent: HASEGAWA Yoshiki; JP
KUROKI Yoshiki; JP
SHIBAYAMA Kenichi; JP
Priority Data:
2016-08612222.04.2016JP
Title (EN) MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND IMAGE ACQUISITION DEVICE
(FR) DISPOSITIF MIROIR, PROCÉDÉ DE COMMANDE DE MIROIR, DISPOSITIF D'ÉCLAIRAGE, ET DISPOSITIF D'ACQUISITION D'IMAGE
(JA) ミラー装置、ミラーの駆動方法、光照射装置及び画像取得装置
Abstract:
(EN) This mirror device 1 includes: a mirror 16 that is supported to pivot about a fast axis A1f and to pivot about a slow axis A2s, the mirror 16 having a first value which is the resonant frequency for pivoting about the fast axis A1f, and a second value which is the resonant frequency for pivoting about the slow axis A2s and is lower than the first value; a signal extraction unit 54 that acquires a synthesized signal N3, which includes an induced signal N4 generated in a slow axis coil 17s caused by the operation of the mirror 16 pivoting about the fast axis A1f, from the slow axis coil 17s and extracts the induced signal N4 from the synthesized signal N3;and a signal generation unit 50 that generates a fast axis drive signal N1 in accordance with the induced signal N4 so that the mirror 16 pivots about the fast axis A1f while resonating.
(FR) L'invention concerne un dispositif miroir 1 qui comprend : un miroir 16 qui est porté de façon à pivoter autour d'un axe rapide A1f et pivoter autour d'un axe lent A2s, le miroir 16 ayant une première valeur qui est la fréquence de résonance pour pivoter autour de l'axe rapide A1f, et une seconde valeur qui est la fréquence de résonance pour pivoter autour de l'axe lent A2s et qui est inférieure à la première valeur ; une unité d'extraction de signal 54 qui acquiert un signal synthétisé N3, qui comprend un signal induit N4 généré dans une bobine d'axe lent 17s provoqué par le fonctionnement du miroir 16 pivotant autour de l'axe rapide A1f, à partir de la bobine d'axe lent 17s et extrait le signal induit N4 du signal synthétisé N3 ; et une unité de génération de signal 50 qui génère un signal de commande d'axe rapide N1 en fonction du signal induit N4 de telle sorte que le miroir 16 pivote autour de l'axe rapide A1f tout en résonnant.
(JA) ミラー装置1は、ファスト軸A1fの周りに揺動可能に支持されると共に、スロー軸A2sの周りに揺動可能に支持されたミラー16であって、ファスト軸A1fに対する揺動の共振周波数が第一の値でありスロー軸A2sに対する揺動の共振周波数が第一の値よりも低い第二の値であるミラー16と、ミラー16をファスト軸A1fの周りに揺動させる動作に起因してスロー軸コイル17sに発生する誘起信号N4を含む合成信号N3をスロー軸コイル17sから得ると共に、合成信号N3から誘起信号N4を抽出する信号抽出部54と、誘起信号N4に応じて、ファスト軸A1fに対するミラー16の揺動が共振状態となるようにファスト軸駆動信号N1を生成する信号生成部50と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)