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1. (WO2017183168) CHARGED PARTICLE MICROSCOPE AND SAMPLE IMAGE PICKUP METHOD

Pub. No.:    WO/2017/183168    International Application No.:    PCT/JP2016/062697
Publication Date: Fri Oct 27 01:59:59 CEST 2017 International Filing Date: Sat Apr 23 01:59:59 CEST 2016
IPC: H01J 37/18
H01J 37/16
H01J 37/244
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
Inventors: SHOUJI Minami
庄子 美南
TSUNO Natsuki
津野 夏規
OOMINAMI Yuusuke
大南 祐介
Title: CHARGED PARTICLE MICROSCOPE AND SAMPLE IMAGE PICKUP METHOD
Abstract:
The present invention provides an electronic microscope capable of performing secondary electron image observation in the atmosphere, and an observation method. More specifically, this charged particle microscope has: a partition wall (31) that separates, from a vacuum space inside of a charged particle optical lens barrel (2), a non-vacuum space, in which a sample is placed; an upper electrode (35); a lower electrode (5), on which a sample (100) is placed; a power supply (21) that applies a voltage to the upper electrode and/or the lower electrode; a sample gap adjusting mechanism (9) that adjusts an interval between the sample and the partition wall; and an image forming unit (15) that forms an image of the sample on the basis of a current absorbed by the lower electrode. A secondary electron is selectively measured using amplification effects due to ionization collision between a gas molecule and an electron, said ionization collision being generated when a voltage is applied between the upper electrode and the lower electrode. A detection system uses a method for measuring the value of a current flowing in the lower electrode.