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Pub. No.:    WO/2017/183167    International Application No.:    PCT/JP2016/062696
Publication Date: Fri Oct 27 01:59:59 CEST 2017 International Filing Date: Sat Apr 23 01:59:59 CEST 2016
IPC: G01B 3/04
G01B 15/00
H01J 37/28
株式会社 日立ハイテクノロジーズ
Inventors: SETO Miharu
瀬戸 美晴
AOKI Kenji
青木 賢治
When a sample is inserted into a scanning electron microscope, to prevent the sample from coming into contact with an objective lens/detector, a height adjustment jig is used to adjust and confirm the height of the sample such that the height matches the setting of control software. A problem with the assumed jig is that because the size of a sample stage creates distance between the sample and jig, it is easy for measurement error to occur as a result of the angle of the line of sight, and the sample height being higher than the control software setting can lead to damage to the sample or detector. Further, placing the sample stage on the front surface of the height adjustment jig reduces the visibility of a scale. The present invention makes it possible to bring a sample and scale close to each other regardless of the size of a sample stage and makes it possible to accurately measure the height of a sample regardless of the viewing angle by giving a height adjustment jig a shape that expands toward the upper surface in the direction of gravity and a scale on an inclined surface thereof. Further, the visibility of the scale is enhanced through the positioning of the sample stage next to the jig during sample height adjustment/confirmation.