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1. (WO2017180947) SYSTEM AND METHOD FOR MASKLESS THIN FILM BATTERY FABRICATION
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Pub. No.: WO/2017/180947 International Application No.: PCT/US2017/027542
Publication Date: 19.10.2017 International Filing Date: 14.04.2017
IPC:
H01M 10/04 (2006.01) ,H01M 10/0585 (2010.01) ,H01M 6/00 (2006.01) ,H01M 6/40 (2006.01) ,H01M 4/04 (2006.01) ,H01M 10/0562 (2010.01) ,H01M 4/139 (2010.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
10
Secondary cells; Manufacture thereof
04
Construction or manufacture in general
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
10
Secondary cells; Manufacture thereof
05
Accumulators with non-aqueous electrolyte
058
Construction or manufacture
0585
of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
6
Primary cells; Manufacture thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
6
Primary cells; Manufacture thereof
40
Printed batteries
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
4
Electrodes
02
Electrodes composed of, or comprising, active material
04
Processes of manufacture in general
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
10
Secondary cells; Manufacture thereof
05
Accumulators with non-aqueous electrolyte
056
characterized by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
0561
the electrolyte being constituted of inorganic materials only
0562
Solid materials
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
M
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
4
Electrodes
02
Electrodes composed of, or comprising, active material
13
Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
139
Processes of manufacture
Applicants: APPLIED MATERIALS, INC.[US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors: ARGYRIS, Dimitrios; US
KWAK, Byung-Sung; US
SUN, Lizhong; US
PARK, Giback; US
Agent: DAISAK, Daniel N.; US
Priority Data:
15/339,16831.10.2016US
62/322,41514.04.2016US
Title (EN) SYSTEM AND METHOD FOR MASKLESS THIN FILM BATTERY FABRICATION
(FR) SYSTÈME ET PROCÉDÉ DE FABRICATION D'UNE PILE À COUCHES MINCES SANS MASQUE
Abstract:
(EN) A method for masklessly fabricating a thin film battery, including securing a substrate to a substrate carrier of a first deposition chamber with a first clamping ring having an aperture, performing a first deposition on the substrate to form a first TFB layer, the aperture of the first clamping ring defining a footprint of the first layer, wherein areas of the substrate covered by the first clamping ring are excluded from the first blanket deposition, securing the substrate to a substrate carrier of a second deposition chamber with a second clamping ring having an aperture, and performing a second deposition on the substrate to form a second TFB layer over the first layer, the aperture of the second clamping ring defining a footprint of the second layer, wherein areas of the substrate and the first layer covered by the second clamping ring are excluded from the second blanket deposition.
(FR) L'invention concerne un procédé de fabrication sans masque d'une pile à couches minces (TFB) qui consiste : à fixer un substrat à un support de substrat d'une première chambre de dépôt à l'aide d'un premier anneau de serrage ayant une ouverture ; à effectuer un premier dépôt sur le substrat de façon à former une première couche de TFB, l'ouverture du premier anneau de serrage délimitant un encombrement de la première couche, des zones du substrat couvertes par le premier anneau de serrage étant exclues du premier dépôt de couverture ; à fixer le substrat à un support de substrat d'une seconde chambre de dépôt à l'aide d'un second anneau de serrage ayant une ouverture ; à effectuer un second dépôt sur le substrat de façon à former une seconde couche de TFB sur la première couche, l'ouverture du second anneau de serrage délimitant un encombrement de la seconde couche, des zones du substrat, ainsi que la première couche couverte par le second anneau de serrage, étant exclues du second dépôt de couverture.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)