Search International and National Patent Collections

1. (WO2017179145) CHARGED PARTICLE BEAM DEVICE AND SAMPLE HOLDER

Pub. No.:    WO/2017/179145    International Application No.:    PCT/JP2016/061871
Publication Date: Fri Oct 20 01:59:59 CEST 2017 International Filing Date: Thu Apr 14 01:59:59 CEST 2016
IPC: H01J 37/20
G01N 1/28
H01J 37/22
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: IKEUCHI Akira
池内 昭朗
HANEDA Shigeru
羽根田 茂
HOSHINO Yoshinobu
星野 吉延
Title: CHARGED PARTICLE BEAM DEVICE AND SAMPLE HOLDER
Abstract:
The purpose of the present invention is to provide a sample holder allowing an observation visual field to be explored readily. The sample holder has: a sample loading portion 137 comprising a first upper surface having formed thereon a countersink portion whereon a sample support member 115 having a positioning pattern is loaded thereby becoming positioned, and a rotation axis for horizontally rotating the first upper surface; a sample stage portion 141 comprising an opening in which the sample loading portion is allowed to rise and sink, and a second upper surface surrounding the opening; and a conductive sample cover portion 140 which, by being pressed downward in the direction of the second upper surface of the sample stage portion, brings the upper surface of the sample support member loaded on the sample loading portion to the same height as the second upper surface of the sample stage portion.