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|1. (WO2017179145) CHARGED PARTICLE BEAM DEVICE AND SAMPLE HOLDER|
|Applicants:||HITACHI HIGH-TECHNOLOGIES CORPORATION
|Title:||CHARGED PARTICLE BEAM DEVICE AND SAMPLE HOLDER|
The purpose of the present invention is to provide a sample holder allowing an observation visual field to be explored readily. The sample holder has: a sample loading portion 137 comprising a first upper surface having formed thereon a countersink portion whereon a sample support member 115 having a positioning pattern is loaded thereby becoming positioned, and a rotation axis for horizontally rotating the first upper surface; a sample stage portion 141 comprising an opening in which the sample loading portion is allowed to rise and sink, and a second upper surface surrounding the opening; and a conductive sample cover portion 140 which, by being pressed downward in the direction of the second upper surface of the sample stage portion, brings the upper surface of the sample support member loaded on the sample loading portion to the same height as the second upper surface of the sample stage portion.