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1. (WO2017178651) DEVICE FOR EXPOSURE OF A SUBSTRATE

Pub. No.:    WO/2017/178651    International Application No.:    PCT/EP2017/059069
Publication Date: Fri Oct 20 01:59:59 CEST 2017 International Filing Date: Sat Apr 15 01:59:59 CEST 2017
IPC: G03F 7/20
H01L 21/687
Applicants: IST METZ GMBH
Inventors: FUCHS, Günter
Title: DEVICE FOR EXPOSURE OF A SUBSTRATE
Abstract:
The invention relates to a device (1) for exposure of a substrate (200) having an exposure unit comprising at least one radiation generator (2) for electromagnetic radiation and having a mask (100), which is transparent to the electromagnetic radiation at least in regions, for transferring a structure or information contained in the mask to the substrate. According to the invention, the mask (100) is connected to the exposure unit by a receiving and holding device (6) and is held thereto by negative pressure, wherein the mask is supported by supporting elements (70, 80) in an orientation that is planar and parallel to the substrate (200).