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1. (WO2017178306) METHOD AND SYSTEM FOR INSPECTING AND MEASURING OPTICALLY A FACE OF AN OBJECT
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2017/178306    International Application No.:    PCT/EP2017/058145
Publication Date: 19.10.2017 International Filing Date: 05.04.2017
IPC:
G01B 9/02 (2006.01), G01B 11/06 (2006.01), G01B 11/24 (2006.01), G02B 21/00 (2006.01), G01N 21/95 (2006.01), G01N 21/956 (2006.01), H01L 21/66 (2006.01)
Applicants: UNITY SEMICONDUCTOR [FR/FR]; 611 rue Aristide Bergès 38330 Montbonnot-Saint-Martin (FR)
Inventors: BOULANGER, Jean-François; (FR).
THOUY, Benoit; (FR)
Agent: PONTET ALLANO & ASSOCIES; Parc Les Algorithmes, Bâtiment PLATON CS 70003 Saint-Aubin 91192 Gif sur Yvette cedex (FR)
Priority Data:
1653158 11.04.2016 FR
Title (EN) METHOD AND SYSTEM FOR INSPECTING AND MEASURING OPTICALLY A FACE OF AN OBJECT
(FR) PROCEDE ET SYSTEME D'INSPECTION ET DE MESURE OPTIQUE D'UNE FACE D'UN OBJET
Abstract: front page image
(EN)The present invention relates to a method (100) for inspecting and measuring a face of an object comprising at least two surfaces that are offset depthwise with respect to each other, said surfaces in particular forming a stair or a trench on/in said face, said method (100) comprising the following steps: measuring (102) an interferometric signal, called the measured signal, at a plurality of points, called measuring points, of said inspected face; for at least one measuring point, performing an extraction (108) from the measured signal, relatively to at least one and in particular each surface, said extraction (108) delivering, for said measuring point and for said surface, an interferometric signal, called the individual interferometric signal; profilometrically analysing (110) the individual signals independently for each surface. The present invention also relates to a system for inspecting and measuring a face of an object implementing such a method.
(FR)La présente invention concerne un procédé (100) d'inspection et de mesure d'une face d'un objet comprenant au moins deux surfaces décalées en profondeur l'une par rapport à l'autre, lesdites surfaces formant en particulier une marche ou une tranchée sur/dans ladite face, ledit procédé (100) comprenant les étapes suivantes : - mesure (102) d'un signal interférométrique, dit signal mesuré, en plusieurs points, dits de mesure, de ladite face inspectée; - pour au moins un point de mesure, extraction (108) du signal mesuré relativement à au moins une, en particulier à chaque, surface, ladite extraction (108) fournissant pour ledit point de mesure un signal interférométrique, dit individuel, pour ladite surface; - analyse (110) profilométrique des signaux individuels, de manière indépendante pour chaque surface. Elle concerne également un système d'inspection et de mesure d'une face d'un objet mettant en œuvre un tel procédé.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)