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1. (WO2017178306) METHOD AND SYSTEM FOR INSPECTING AND MEASURING OPTICALLY A FACE OF AN OBJECT

Pub. No.:    WO/2017/178306    International Application No.:    PCT/EP2017/058145
Publication Date: Fri Oct 20 01:59:59 CEST 2017 International Filing Date: Thu Apr 06 01:59:59 CEST 2017
IPC: G01B 9/02
G01B 11/06
G01B 11/24
G02B 21/00
G01N 21/95
G01N 21/956
H01L 21/66
Applicants: UNITY SEMICONDUCTOR
Inventors: BOULANGER, Jean-François
THOUY, Benoit
Title: METHOD AND SYSTEM FOR INSPECTING AND MEASURING OPTICALLY A FACE OF AN OBJECT
Abstract:
The present invention relates to a method (100) for inspecting and measuring a face of an object comprising at least two surfaces that are offset depthwise with respect to each other, said surfaces in particular forming a stair or a trench on/in said face, said method (100) comprising the following steps: measuring (102) an interferometric signal, called the measured signal, at a plurality of points, called measuring points, of said inspected face; for at least one measuring point, performing an extraction (108) from the measured signal, relatively to at least one and in particular each surface, said extraction (108) delivering, for said measuring point and for said surface, an interferometric signal, called the individual interferometric signal; profilometrically analysing (110) the individual signals independently for each surface. The present invention also relates to a system for inspecting and measuring a face of an object implementing such a method.