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1. (WO2017176915) DUAL-COLUMN-PARALLEL CCD SENSOR AND INSPECTION SYSTEMS USING A SENSOR

Pub. No.:    WO/2017/176915    International Application No.:    PCT/US2017/026199
Publication Date: Fri Oct 13 01:59:59 CEST 2017 International Filing Date: Thu Apr 06 01:59:59 CEST 2017
IPC: H04N 5/372
H04N 5/378
H01L 27/146
Applicants: KLA-TENCOR CORPORATION
Inventors: CHUANG, Yung-Ho Alex
ZHANG, Jingjing
ZAMEK, Steve
FIELDEN, John
CONTARATO, Devis
BROWN, David L.
Title: DUAL-COLUMN-PARALLEL CCD SENSOR AND INSPECTION SYSTEMS USING A SENSOR
Abstract:
A dual-column-parallel image CCD sensor utilizes a dual-column-parallel readout circuit including two pairs of cross-connected transfer gates to alternately transfer pixel data (charges) from a pair of adjacent pixel columns to a shared output circuit at high speed with low noise. Charges transferred along the two adjacent pixel columns at a line clock rate are alternately passed by the transfer gates to a summing gate that is operated at twice the line clock rate to pass the image charges to the shared output circuit. A symmetrical Y-shaped diffusion is utilized in one embodiment to merge the image charges from the two pixel columns. A method of driving the dual-column-parallel CCD sensor with line clock synchronization is also described. A method of inspecting a sample using the dual-column-parallel CCD sensor is also described.