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1. (WO2017175668) METHOD FOR FORMING CURED OBJECT PATTERN, METHOD FOR MANUFACTURING MACHINED SUBSTRATE, METHOD FOR MANUFACTURING OPTICAL PART, METHOD FOR MANUFACTURING CIRCUIT BOARD, METHOD FOR MANUFACTURING ELECTRONIC PART, METHOD FOR MANUFACTURING IMPRINTED MOLD, AND MATERIAL FOR PRE-IMPRINTING TREATMENT COAT

Pub. No.:    WO/2017/175668    International Application No.:    PCT/JP2017/013501
Publication Date: Fri Oct 13 01:59:59 CEST 2017 International Filing Date: Sat Apr 01 01:59:59 CEST 2017
IPC: H01L 21/027
B29C 59/02
Applicants: CANON KABUSHIKI KAISHA
キヤノン株式会社
Inventors: KATO Jun
加藤 順
HONMA Takeshi
本間 猛
ITO Toshiki
伊藤 俊樹
TSUZUKI Hidetoshi
都築 英寿
Title: METHOD FOR FORMING CURED OBJECT PATTERN, METHOD FOR MANUFACTURING MACHINED SUBSTRATE, METHOD FOR MANUFACTURING OPTICAL PART, METHOD FOR MANUFACTURING CIRCUIT BOARD, METHOD FOR MANUFACTURING ELECTRONIC PART, METHOD FOR MANUFACTURING IMPRINTED MOLD, AND MATERIAL FOR PRE-IMPRINTING TREATMENT COAT
Abstract:
A method for manufacturing a cured object pattern, said method comprising a first step (disposing step) for disposing a layer comprising a curing composition (α1) on a substrate, and a second step (applying step) in which droplets of a curing composition (α2) are applied by being scattered over a layer comprising a curing composition (α1'), which comprises the components of the curing composition (α1), excluding the solvent component (D), wherein the curing composition (α1) has a number concentration of 2021/mL of particles having a particle diameter of 0.07 μm or more, and the curing composition (α1') has a greater surface tension than the curing composition (α2).