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1. (WO2017174632) MICRO-TRANSFER PRINTED LED AND COLOR FILTER STRUCTURE

Pub. No.:    WO/2017/174632    International Application No.:    PCT/EP2017/058066
Publication Date: Fri Oct 13 01:59:59 CEST 2017 International Filing Date: Thu Apr 06 01:59:59 CEST 2017
IPC: H01L 33/00
H01L 23/00
H01L 25/075
H01L 33/50
Applicants: X-CELEPRINT LIMITED
Inventors: COK, Ronald S.
BOWER, Christopher Andrew
Title: MICRO-TRANSFER PRINTED LED AND COLOR FILTER STRUCTURE
Abstract:
A micro-transfer printed intermediate structure comprises an intermediate substrate and one or more pixel structures disposed on the intermediate substrate. Each pixel structure includes an LED, a color filter, and a fractured pixel tether physically attached to the pixel structure. A fractured intermediate tether is physically attached to the intermediate substrate. A method of making an intermediate structure source wafer comprises providing a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors, disposing an intermediate substrate over the patterned sacrificial layer, and disposing one or more pixel structures on the intermediate substrate entirely on or over each sacrificial portion. Each pixel structure includes an LED, a color filter, and a fractured pixel tether physically attached to the pixel structure to form an intermediate structure.