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1. (WO2017173097) APPARATUS AND METHOD FOR PROVIDING A UNIFORM FLOW OF GAS

Pub. No.:    WO/2017/173097    International Application No.:    PCT/US2017/025045
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Fri Mar 31 01:59:59 CEST 2017
IPC: H01L 21/02
H01L 21/205
H01L 21/683
Applicants: APPLIED MATERIALS, INC.
Inventors: JALLEPALLY, Ravi
RASHEED, Muhammad M.
DURUKAN, Ilker
Title: APPARATUS AND METHOD FOR PROVIDING A UNIFORM FLOW OF GAS
Abstract:
Outer distribution rings and gas distribution apparatus with outer distribution rings to deliver a gas flow to a process region of a process chamber are described. The outer distribution rings include at least one plenum in fluid communication with a plurality of openings forming a plurality of trenches to allow gas to flow from the plenum through the openings and down an inner peripheral face of the outer distribution ring.