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1. (WO2017172737) MULTI-CHANNEL PHOTOMULTIPLIER TUBE ASSEMBLY

Pub. No.:    WO/2017/172737    International Application No.:    PCT/US2017/024498
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Wed Mar 29 01:59:59 CEST 2017
IPC: H01J 40/04
H01J 43/06
Applicants: KLA-TENCOR CORPORATION
Inventors: MACKAY, Derek
Title: MULTI-CHANNEL PHOTOMULTIPLIER TUBE ASSEMBLY
Abstract:
A multi-channel photomultiplier tube (PMT) detector assembly includes a photocathode. The detector assembly includes a first dynode channel including a first set of dynode pathways. The first set of dynode pathways include a plurality of dynode stages configured to receive a first portion of the photoelectrons and direct a first amplified photoelectron current onto a first anode. The detector assembly includes an additional dynode channel including an additional set of dynode pathways. The additional set of dynode pathways includes a plurality of dynode stages configured to receive an additional portion of the photoelectrons and direct an additional amplified photoelectron current onto an additional anode. The detector assembly includes a grid configured to direct the first portion of the photoelectrons to one or more of the first set of pathways and an additional portion of the photoelectrons to one or more of the additional set of pathways.