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1. (WO2017172631) HIGH BRIGHTNESS LASER-SUSTAINED PLASMA BROADBAND SOURCE

Pub. No.:    WO/2017/172631    International Application No.:    PCT/US2017/024339
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Tue Mar 28 01:59:59 CEST 2017
IPC: H01J 65/04
H01J 61/02
H01J 61/30
Applicants: KLA-TENCOR CORPORATION
Inventors: CHUANG, Yung-Ho Alex
LU, Xiaoxu
LIOU, Justin Dianhuan
FIELDEN, John
Title: HIGH BRIGHTNESS LASER-SUSTAINED PLASMA BROADBAND SOURCE
Abstract:
A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.