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1. (WO2017172131) SUSCEPTOR SUPPORT

Pub. No.:    WO/2017/172131    International Application No.:    PCT/US2017/019102
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Fri Feb 24 00:59:59 CET 2017
IPC: H01L 21/683
H01L 21/205
H01L 21/687
Applicants: APPLIED MATERIALS, INC.
Inventors: COLLINS, Richard, O.
SANCHEZ, Errol, Antonio, C.
CARLSON, David, K.
SAMIR, Mehmet, Tugrul
Title: SUSCEPTOR SUPPORT
Abstract:
Embodiments described herein generally relate to a susceptor support for supporting a susceptor in a deposition process. The susceptor support includes a shaft, a plate with a first major surface coupled to the shaft, and a support element extending from a second major surface of the plate. The plate may be made of a material that is optically transparent to the radiation energy from a plurality of energy sources disposed below the plate. The plate may have a thickness that is small enough to minimize radiation transmission loss and large enough to be thermally and mechanically stable to support the susceptor during processing. The thickness of the plate may range from about 2 mm to about 20 mm.