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Machine translation
1. (WO2017171989) CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2017/171989    International Application No.:    PCT/US2017/014615
Publication Date: 05.10.2017 International Filing Date: 23.01.2017
IPC:
H01L 21/02 (2006.01), H01L 21/56 (2006.01), H01L 21/3065 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US)
Inventors: LEE, Chengtsin; (US).
SUN, Jennifer Y.; (US).
CHEN, Yikai; (US)
Agent: PORTNOVA, Marina; (US).
KIMES, Benjamin A.; (US)
Priority Data:
15/089,212 01.04.2016 US
Title (EN) CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE
(FR) PROCÉDÉ DE NETTOYAGE QUI PRÉCIPITE L'OXYFLUORURE D'YTTRIUM
Abstract: front page image
(EN)A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol% HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.
(FR)L'invention concerne un procédé comprenant l'immersion d'un article comprenant un oxyde à base d'yttrium dans une solution de nettoyage acide comprenant de l'eau et de 1 à 10 % en moles d'acide HF. Une portion de l'oxyde à base d'yttrium est dissoute par l'acide HF. Un oxyfluorure à base d'yttrium est formé sur la base d'une réaction entre l'acide HF et la portion dissoute de l'oxyde à base d'yttrium. L'oxyfluorure à base d'yttrium est précipité sur l'article au-dessus de l'oxyde à base d'yttrium afin de former un revêtement d'oxyfluorure à base d'yttrium. La solution de nettoyage acide peut contenir un sel à base d'yttrium, qui peut en plus réagir avec l'acide HF pour former davantage d'oxyfluorure à base d'yttrium.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)