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1. (WO2017171989) CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE

Pub. No.:    WO/2017/171989    International Application No.:    PCT/US2017/014615
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Tue Jan 24 00:59:59 CET 2017
IPC: H01L 21/02
H01L 21/56
H01L 21/3065
Applicants: APPLIED MATERIALS, INC.
Inventors: LEE, Chengtsin
SUN, Jennifer Y.
CHEN, Yikai
Title: CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE
Abstract:
A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol% HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.