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1. (WO2017171862) PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS

Pub. No.:    WO/2017/171862    International Application No.:    PCT/US2016/025667
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Apr 02 01:59:59 CEST 2016
IPC: G02B 26/08
G02B 1/10
H01S 3/034
Applicants: INTEL CORPORATION
Inventors: ALEKSOV, Aleksandar
EID, Feras
OSTER, Sasha N.
LIFF, Shawna M.
SWAN, Johanna M.
SOUNART, Thomas L.
BICEN, Baris
RAO, Valluri R.
Title: PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS
Abstract:
Embodiments of the invention include maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. According to an embodiment, the maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. In an embodiment, the piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Additional embodiments of the invention may include a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. Other embodiments may include a maskless imaging tool that is a via-drill tool. Embodiments of the invention may also include a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.