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|1. (WO2017171862) PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS|
OSTER, Sasha N.
LIFF, Shawna M.
SWAN, Johanna M.
SOUNART, Thomas L.
RAO, Valluri R.
|Title:||PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS|
Embodiments of the invention include maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. According to an embodiment, the maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. In an embodiment, the piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Additional embodiments of the invention may include a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. Other embodiments may include a maskless imaging tool that is a via-drill tool. Embodiments of the invention may also include a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.