Search International and National Patent Collections
|1. (WO2017171855) STRAIN SENSITIVE PIEZOELECTRIC SYSTEM WITH OPTICAL INDICATOR|
OSTER, Sasha N.
LIFF, Shawna M.
SWAN, Johanna M.
SOUNART, Thomas L.
RAO, Valluri R.
|Title:||STRAIN SENSITIVE PIEZOELECTRIC SYSTEM WITH OPTICAL INDICATOR|
Embodiments of the invention include a piezoelectric sensor system. According to an embodiment of the invention, the piezoelectric sensor system may include a piezoelectric sensor, a signal conditioning circuit, and a light source each formed on an organic or flexible substrate. In embodiments of the invention, the piezoelectric sensor may be a discrete component or the piezoelectric sensor may be integrated into the substrate. According to an embodiment, a piezoelectric sensor that is integrated into the substrate may comprise, a cavity formed into the organic substrate and a moveable beam formed over the cavity and anchored to the organic substrate. Additionally, the piezoelectric sensor may include a piezoelectric region formed over an end portion of the moveable beam and extending at least partially over the cavity. The piezoelectric sensor may also include a top electrode formed over a top surface of the piezoelectric region.