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1. (WO2017171855) STRAIN SENSITIVE PIEZOELECTRIC SYSTEM WITH OPTICAL INDICATOR

Pub. No.:    WO/2017/171855    International Application No.:    PCT/US2016/025654
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Apr 02 01:59:59 CEST 2016
IPC: H01L 41/113
H01L 41/047
H01L 41/18
H01L 41/35
H01L 41/332
F21S 9/04
Applicants: INTEL CORPORATION
Inventors: EID, Feras
OSTER, Sasha N.
LIFF, Shawna M.
SWAN, Johanna M.
SOUNART, Thomas L.
ALEKSOV, Aleksandar
RAO, Valluri R.
BICEN, Baris
Title: STRAIN SENSITIVE PIEZOELECTRIC SYSTEM WITH OPTICAL INDICATOR
Abstract:
Embodiments of the invention include a piezoelectric sensor system. According to an embodiment of the invention, the piezoelectric sensor system may include a piezoelectric sensor, a signal conditioning circuit, and a light source each formed on an organic or flexible substrate. In embodiments of the invention, the piezoelectric sensor may be a discrete component or the piezoelectric sensor may be integrated into the substrate. According to an embodiment, a piezoelectric sensor that is integrated into the substrate may comprise, a cavity formed into the organic substrate and a moveable beam formed over the cavity and anchored to the organic substrate. Additionally, the piezoelectric sensor may include a piezoelectric region formed over an end portion of the moveable beam and extending at least partially over the cavity. The piezoelectric sensor may also include a top electrode formed over a top surface of the piezoelectric region.