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1. (WO2017170936) PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR

Pub. No.:    WO/2017/170936    International Application No.:    PCT/JP2017/013408
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Fri Mar 31 01:59:59 CEST 2017
IPC: H01L 27/146
G01T 1/20
H01L 21/336
H01L 21/768
H01L 23/522
H01L 27/144
H01L 29/786
H01L 31/08
H04N 5/32
H04N 5/369
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: MORIWAKI Hiroyuki
森脇 弘幸
TOMIYASU Kazuhide
冨安 一秀
NAKAZAWA Makoto
中澤 淳
NAKANO Fumiki
中野 文樹
NAKAMURA Wataru
中村 渉
Title: PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR
Abstract:
A photoelectric converter according to one aspect of the present invention is provided with an element substrate having a photodiode and a thin film transistor arranged in matrix form, an interlayer insulation film layered on the thin film transistor, a first contact hole formed in the interlayer insulation film and reaching the surface of a source electrode of the thin film transistor, and a second contact hole formed in the interlayer insulation film and reaching the surface of a drain electrode of the thin film transistor. A source bus line and the source electrode of the thin film transistor are connected via the first contact hole, the drain electrode of the thin film transistor and a lower layer electrode of the photodiode are connected via the second contact hole, and the tapered part of the second contact hole has a gentler slope than the tapered part of the first contact hole.