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|1. (WO2017170936) PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR|
|Applicants:||SHARP KABUSHIKI KAISHA
|Title:||PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR|
A photoelectric converter according to one aspect of the present invention is provided with an element substrate having a photodiode and a thin film transistor arranged in matrix form, an interlayer insulation film layered on the thin film transistor, a first contact hole formed in the interlayer insulation film and reaching the surface of a source electrode of the thin film transistor, and a second contact hole formed in the interlayer insulation film and reaching the surface of a drain electrode of the thin film transistor. A source bus line and the source electrode of the thin film transistor are connected via the first contact hole, the drain electrode of the thin film transistor and a lower layer electrode of the photodiode are connected via the second contact hole, and the tapered part of the second contact hole has a gentler slope than the tapered part of the first contact hole.