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1. (WO2017169914) RADIATION SENSITIVE RESIN COMPOSITION AND ELECTRONIC COMPONENT

Pub. No.:    WO/2017/169914    International Application No.:    PCT/JP2017/010961
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Mar 18 00:59:59 CET 2017
IPC: G03F 7/023
C08L 63/00
C08L 65/00
G03F 7/004
G03F 7/075
Applicants: ZEON CORPORATION
日本ゼオン株式会社
Inventors: TSUTSUMI, Takashi
堤 隆志
FUJIMURA, Makoto
藤村 誠
Title: RADIATION SENSITIVE RESIN COMPOSITION AND ELECTRONIC COMPONENT
Abstract:
Provided is a radiation sensitive resin composition which contains (A) a cyclic olefin polymer having a protonic polar group, (B) a bifunctional epoxy compound represented by general formula (1) and (C) a radiation sensitive compound. (In general formula (1), R1 represents a linear or branched alkylene group having 1-15 carbon atoms; and k represents an integer of 1-20.)