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1. (WO2017169882) IMAGE PICKUP ELEMENT, METHOD FOR MANUFACTURING IMAGE PICKUP ELEMENT, AND ELECTRONIC APPARATUS

Pub. No.:    WO/2017/169882    International Application No.:    PCT/JP2017/010863
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Mar 18 00:59:59 CET 2017
IPC: H01L 27/146
H01L 21/768
H01L 21/822
H01L 27/04
H04N 5/355
H04N 5/374
Applicants: SONY CORPORATION
ソニー株式会社
Inventors: MIZUTA Kyohei
水田 恭平
Title: IMAGE PICKUP ELEMENT, METHOD FOR MANUFACTURING IMAGE PICKUP ELEMENT, AND ELECTRONIC APPARATUS
Abstract:
The present art relates to: an image pickup element enabling to suppress sensitivity deterioration of the image pickup element in the cases where a capacitive element is provided in a pixel; a method for manufacturing the image pickup element; and an electronic apparatus. Disclosed is an image pickup element wherein a photoelectric conversion element, and a capacitive element for accumulating charges generated by the photoelectric conversion element are provided in a pixel. The capacitive element is provided with: a first electrode that is provided with a plurality of trenches; a plurality of second electrodes, each of which has a cross-sectional area that is smaller than that of a contact connected to the gate electrode of a transistor in the pixel, and each of which is embedded in each of the trenches; and a first insulating film that is disposed between the first electrode and each of the second electrodes in each of the trenches. The present art can be applied to, for instance, a rear surface irradiation-type CMOS image sensor.