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1. (WO2017169743) POLISHING COMPOSITION USED FOR POLISHING OF POLISHING OBJECT HAVING LAYER THAT CONTAINS METAL

Pub. No.:    WO/2017/169743    International Application No.:    PCT/JP2017/010224
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Wed Mar 15 00:59:59 CET 2017
IPC: C09K 3/14
B24B 37/00
H01L 21/304
Applicants: FUJIMI INCORPORATED
株式会社フジミインコーポレーテッド
Inventors: ONISHI, Shogo
大西 正悟
SATO, Takeki
佐藤 剛樹
Title: POLISHING COMPOSITION USED FOR POLISHING OF POLISHING OBJECT HAVING LAYER THAT CONTAINS METAL
Abstract:
[Problem] To provide a polishing composition which is used for polishing of a polishing object having a layer that contains a metal, and which is capable of achieving sufficient planarization. [Solution] A polishing composition which is used for polishing of a polishing object having a layer that contains a metal, and which contains abrasive grains, an oxidant, a dispersion medium and an anti-corrosion agent that has an acidic functional group and a basic functional group.