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|1. (WO2017169710) OPTICAL WAVEGUIDE CIRCUIT DEVICE|
|Applicants:||FURUKAWA ELECTRIC CO., LTD.
|Title:||OPTICAL WAVEGUIDE CIRCUIT DEVICE|
An optical waveguide circuit device is provided with an optical waveguide circuit, a plurality of heaters, a plurality of wiring electrode layers, and an insulating layer. The optical waveguide circuit has a cladding layer comprising silica-based glass formed on a substrate, and a plurality of optical waveguides comprising silica-based glass formed in the cladding layer. The plurality of heaters are each formed above the cladding layer of the optical waveguide circuit and above the optical waveguide, and heat the optical waveguides of the optical waveguide circuit. The plurality of wiring electrode layers are formed above the cladding layer of the optical waveguide circuit, connect with the plurality of heaters, respectively, and supply electric power to the connected heaters. The insulating layer covers these cladding layer, heaters and plurality of wiring electrode layers. The plurality of wiring electrode layers are each formed in any of a plurality of wiring layers having different distances from the substrate of the optical waveguide circuit. The wiring electrode layers adjacent to each other in plan view are formed in different wiring layers, respectively. The wiring electrode layers adjacent to each other in the same wiring layer are disposed a predetermined distance or more apart from each other.