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1. (WO2017169710) OPTICAL WAVEGUIDE CIRCUIT DEVICE

Pub. No.:    WO/2017/169710    International Application No.:    PCT/JP2017/010077
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Wed Mar 15 00:59:59 CET 2017
IPC: G02F 1/01
G02B 6/12
G02B 6/125
Applicants: FURUKAWA ELECTRIC CO., LTD.
古河電気工業株式会社
Inventors: TAKAHASHI, Masanori
高橋 正典
UCHIDA, Yasuyoshi
内田 泰芳
YAMASAKI, Shintaro
山崎 慎太郎
HASEGAWA, Junichi
長谷川 淳一
Title: OPTICAL WAVEGUIDE CIRCUIT DEVICE
Abstract:
An optical waveguide circuit device is provided with an optical waveguide circuit, a plurality of heaters, a plurality of wiring electrode layers, and an insulating layer. The optical waveguide circuit has a cladding layer comprising silica-based glass formed on a substrate, and a plurality of optical waveguides comprising silica-based glass formed in the cladding layer. The plurality of heaters are each formed above the cladding layer of the optical waveguide circuit and above the optical waveguide, and heat the optical waveguides of the optical waveguide circuit. The plurality of wiring electrode layers are formed above the cladding layer of the optical waveguide circuit, connect with the plurality of heaters, respectively, and supply electric power to the connected heaters. The insulating layer covers these cladding layer, heaters and plurality of wiring electrode layers. The plurality of wiring electrode layers are each formed in any of a plurality of wiring layers having different distances from the substrate of the optical waveguide circuit. The wiring electrode layers adjacent to each other in plan view are formed in different wiring layers, respectively. The wiring electrode layers adjacent to each other in the same wiring layer are disposed a predetermined distance or more apart from each other.