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1. (WO2017169404) WORKPIECE TRANSPORTING DEVICE, LIGHT IRRADIATION DEVICE, WORKPIECE TRANSPORTING METHOD, AND LIGHT IRRADIATION METHOD

Pub. No.:    WO/2017/169404    International Application No.:    PCT/JP2017/007247
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Feb 25 00:59:59 CET 2017
IPC: G03F 7/20
B23Q 1/25
G02F 1/13
G05D 3/12
H01L 21/68
Applicants: USHIO DENKI KABUSHIKI KAISHA
ウシオ電機株式会社
Inventors: NOMOTO Kentaro
野本 憲太郎
TARUMI Noriyasu
垂水 規泰
Title: WORKPIECE TRANSPORTING DEVICE, LIGHT IRRADIATION DEVICE, WORKPIECE TRANSPORTING METHOD, AND LIGHT IRRADIATION METHOD
Abstract:
[Problem] To provide a workpiece transporting device with which it is possible to repeat transportation and stopping with high precision of the stop position, which does not compromise productivity. [Solution] A stage 3 is disposed on a base plate 2 that is disposed on an anti-vibration table 1 with anti-vibration elastic bodies 13, 14 interposed between the base plate 2 and the anti-vibration table 1, and a workpiece W on the stage 3 is transported by a moving mechanism 4 moving the stage 3. In a moving speed sequence for the stage, implemented in a control unit 5, acceleration and deceleration periods are periods with which the first peak of the vibration of the base plate 2 due to the driving reaction torque after the end of the acceleration or deceleration section is less than or equal to half the maximum value in relation to the natural vibration period of the anti-vibration elastic bodies 13, 14.