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1. (WO2017169247) X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD
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Pub. No.: WO/2017/169247 International Application No.: PCT/JP2017/005679
Publication Date: 05.10.2017 International Filing Date: 16.02.2017
IPC:
G01N 23/223 (2006.01) ,G01N 23/207 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
22
by measuring secondary emission
223
by irradiating the sample with X-rays and by measuring X-ray fluorescence
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
20
by using diffraction of the radiation, e.g. for investigating crystal structure; by using reflection of the radiation
207
by means of diffractometry using detectors, e.g. using an analysing crystal or a crystal to be analysed in a central position and one or more displaceable detectors in circumferential positions
Applicants:
株式会社リガク RIGAKU CORPORATION [JP/JP]; 東京都昭島市松原町3丁目9番12号 9-12, Matsubara-cho 3-chome, Akishima-shi, Tokyo 1968666, JP
Inventors:
表 和彦 OMOTE, Kazuhiko; JP
奥田 和明 OKUDA, Kazuaki; JP
山田 隆 YAMADA, Takashi; JP
Agent:
杉本 修司 SUGIMOTO, Shuji; JP
野田 雅士 NODA, Masashi; JP
堤 健郎 TSUTSUMI, Takeo; JP
Priority Data:
2016-06899830.03.2016JP
Title (EN) X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD
(FR) ANALYSEUR DE FLUORESCENCE X ET PROCÉDÉ D’ANALYSE DE FLUORESCENCE X
(JA) 蛍光X線分析装置および蛍光X線分析方法
Abstract:
(EN) An X-ray fluorescence analyzer (1) is provided with an X-ray tube (2), dispersing elements (43a-c, 44a-f) that disperse the X-rays (3) radiated by the X-ray tube (2) and reflect prescribed characteristic X-rays and prescribed consecutive X-rays that have greater energy than the prescribed characteristic X-rays, and a detector (10) for measuring the intensity of secondary X-rays (9) emitted from a sample (S) irradiated with primary X-rays (7) that include the prescribed characteristic X-rays and prescribed consecutive X-rays. The X-ray fluorescence analyzer (1) determines the quantity of an element to be measured on the basis of the ratio of the measured intensity of the X-ray fluorescence (9) emitted from the element to be measured to the measured intensity of the X-ray fluorescence that has greater energy than the prescribed characteristic X-rays and has been emitted from an internal standard element designated from the elements included in the target material of the X-ray tube (2).
(FR) La présente invention concerne un analyseur de fluorescence X (1) qui est pourvu d’un tube à rayons X (2), d’éléments de dispersion (43a-c, 44a-f) qui dispersent les rayons X (3) irradiés par le tube à rayons X (2) et réfléchissent des rayons X caractéristiques prescrits et des rayons X consécutifs prescrits qui ont une énergie plus élevée que les rayons X caractéristiques prescrits, et d’un détecteur (10) pour mesurer l’intensité de rayons X secondaires (9) émis par un échantillon (S) irradié avec les rayons X primaires (7) qui comprennent les rayons X caractéristiques prescrits et les rayons X consécutifs prescrits. L'analyseur de fluorescence X (1) détermine la quantité d'un élément à mesurer sur la base du rapport de l'intensité mesurée de la fluorescence X (9) émise par l'élément à mesurer à l'intensité mesurée de la fluorescence X qui a une énergie plus élevée que les rayons X caractéristiques prescrits et a été émise par un élément standard interne désigné parmi les éléments inclus dans le matériau cible du tube à rayons X (2).
(JA) 本発明の蛍光X線分析装置(1)は、X線管(2)と、X線管(2)から放射されたX線(3)を分光する分光素子であって、所定の特性X線、および、その所定の特性X線よりも高エネルギーである所定の連続X線を反射する分光素子(43a~c、44a~f)と、所定の特性X線および所定の連続X線を含む1次X線(7)が照射された試料(S)から発生する2次X線(9)の強度を測定する検出器(10)と、を備え、X線管(2)のターゲット材に含まれる元素から指定された内標準元素から発生する、所定の特性X線よりも高エネルギーの蛍光X線の測定強度に対する、測定対象元素から発生する蛍光X線(9)の測定強度の比に基づいて測定対象元素を定量する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)