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1. WO2017169247 - X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD

Publication Number WO/2017/169247
Publication Date 05.10.2017
International Application No. PCT/JP2017/005679
International Filing Date 16.02.2017
IPC
G01N 23/223 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
22by measuring secondary emission from the material
223by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
G01N 23/207 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
207Diffractometry, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
CPC
G01N 23/207
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
207Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
G01N 23/223
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
22by measuring secondary emission from the material
223by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
Applicants
  • 株式会社リガク RIGAKU CORPORATION [JP]/[JP]
Inventors
  • 表 和彦 OMOTE, Kazuhiko
  • 奥田 和明 OKUDA, Kazuaki
  • 山田 隆 YAMADA, Takashi
Agents
  • 杉本 修司 SUGIMOTO, Shuji
  • 野田 雅士 NODA, Masashi
  • 堤 健郎 TSUTSUMI, Takeo
Priority Data
2016-06899830.03.2016JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD
(FR) ANALYSEUR DE FLUORESCENCE X ET PROCÉDÉ D’ANALYSE DE FLUORESCENCE X
(JA) 蛍光X線分析装置および蛍光X線分析方法
Abstract
(EN)
An X-ray fluorescence analyzer (1) is provided with an X-ray tube (2), dispersing elements (43a-c, 44a-f) that disperse the X-rays (3) radiated by the X-ray tube (2) and reflect prescribed characteristic X-rays and prescribed consecutive X-rays that have greater energy than the prescribed characteristic X-rays, and a detector (10) for measuring the intensity of secondary X-rays (9) emitted from a sample (S) irradiated with primary X-rays (7) that include the prescribed characteristic X-rays and prescribed consecutive X-rays. The X-ray fluorescence analyzer (1) determines the quantity of an element to be measured on the basis of the ratio of the measured intensity of the X-ray fluorescence (9) emitted from the element to be measured to the measured intensity of the X-ray fluorescence that has greater energy than the prescribed characteristic X-rays and has been emitted from an internal standard element designated from the elements included in the target material of the X-ray tube (2).
(FR)
La présente invention concerne un analyseur de fluorescence X (1) qui est pourvu d’un tube à rayons X (2), d’éléments de dispersion (43a-c, 44a-f) qui dispersent les rayons X (3) irradiés par le tube à rayons X (2) et réfléchissent des rayons X caractéristiques prescrits et des rayons X consécutifs prescrits qui ont une énergie plus élevée que les rayons X caractéristiques prescrits, et d’un détecteur (10) pour mesurer l’intensité de rayons X secondaires (9) émis par un échantillon (S) irradié avec les rayons X primaires (7) qui comprennent les rayons X caractéristiques prescrits et les rayons X consécutifs prescrits. L'analyseur de fluorescence X (1) détermine la quantité d'un élément à mesurer sur la base du rapport de l'intensité mesurée de la fluorescence X (9) émise par l'élément à mesurer à l'intensité mesurée de la fluorescence X qui a une énergie plus élevée que les rayons X caractéristiques prescrits et a été émise par un élément standard interne désigné parmi les éléments inclus dans le matériau cible du tube à rayons X (2).
(JA)
本発明の蛍光X線分析装置(1)は、X線管(2)と、X線管(2)から放射されたX線(3)を分光する分光素子であって、所定の特性X線、および、その所定の特性X線よりも高エネルギーである所定の連続X線を反射する分光素子(43a~c、44a~f)と、所定の特性X線および所定の連続X線を含む1次X線(7)が照射された試料(S)から発生する2次X線(9)の強度を測定する検出器(10)と、を備え、X線管(2)のターゲット材に含まれる元素から指定された内標準元素から発生する、所定の特性X線よりも高エネルギーの蛍光X線の測定強度に対する、測定対象元素から発生する蛍光X線(9)の測定強度の比に基づいて測定対象元素を定量する。
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