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1. (WO2017169055) POLISHING PAD AND POLISHING METHOD

Pub. No.:    WO/2017/169055    International Application No.:    PCT/JP2017/003016
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Sat Jan 28 00:59:59 CET 2017
IPC: B24B 37/24
B24B 37/22
B24D 11/00
H01L 21/304
Applicants: FUJIMI INCORPORATED
株式会社フジミインコーポレーテッド
Inventors: ASAI Maiko
浅井 舞子
ITO Yuuichi
伊藤 友一
TAMAI Kazusei
玉井 一誠
TAHARA Muneaki
田原 宗明
Title: POLISHING PAD AND POLISHING METHOD
Abstract:
Provided is a polishing pad with which it is possible, when polishing an object to be polished that has a convex part and/or a concave part on the surface thereof, to adequately polish the portion near the convex part and/or the inner surface of the concave part on the surface of the object to be polished. The polishing pad has an erect fiber part (1) in which a plurality of fibers (12) having a length of 3 mm or more are provided to be erect on the surface of a base part (11), the number of fibers (12) being 10,000/cm2 or higher.