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1. (WO2017168709) CHARGED PARTICLE BEAM APPLICATION DEVICE

Pub. No.:    WO/2017/168709    International Application No.:    PCT/JP2016/060781
Publication Date: Fri Oct 06 01:59:59 CEST 2017 International Filing Date: Fri Apr 01 01:59:59 CEST 2016
IPC: H01J 37/244
H01J 37/05
H01J 37/147
H01J 37/22
Applicants: HITACHI, LTD.
株式会社日立製作所
Inventors: SHIRASAKI, Yasuhiro
白崎 保宏
ENYAMA, Momoyo
圓山 百代
Title: CHARGED PARTICLE BEAM APPLICATION DEVICE
Abstract:
This charged particle beam application device detects a secondary charged particle beam (109) that is generated by irradiating a primary charged particle beam (102) onto a sample (107). This charged particle beam application device comprises: an image shift deflector (104) moving the region to be irradiated when irradiating the primary charged particle beam onto the sample; a magnetic field sector (103) whereby the primary charged particle beam and the secondary charged particle beam from the sample which traverse the interior thereof become separated due to a magnetic field generated therein; a swing-back mechanism (110) disposed inside the magnetic field sector, offset from the primary charged particle beam trajectory, and on the secondary charged particle beam trajectory, for deflecting the secondary charged particle beam passing therethrough; and a controller (114) controlling the swing-back mechanism according to an established relationship between the shifting amount due to the image shift deflector and the swing-back amount due to the swing-back mechanism.