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1. (WO2017168033) RADIATION WINDOW STRUCTURE AND A METHOD FOR MANUFACTURING THE RADIATION WINDOW STRUCTURE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/168033 International Application No.: PCT/FI2016/050193
Publication Date: 05.10.2017 International Filing Date: 29.03.2016
IPC:
H01J 35/18 (2006.01) ,H01J 5/18 (2006.01) ,H01J 33/04 (2006.01) ,C23C 14/06 (2006.01) ,C23C 14/24 (2006.01) ,B32B 37/24 (2006.01) ,B32B 38/10 (2006.01) ,G01T 1/00 (2006.01)
Applicants: HS FOILS OY[FI/FI]; Hannuksenkuja 1 C 02270 Espoo, FI
Inventors: SIPILÄ, Heikki Johannes; FI
Agent: BERGGREN OY; P.O. Box 16 Eteläinen Rautatiekatu 10 A 00101 Helsinki, FI
Priority Data:
Title (EN) RADIATION WINDOW STRUCTURE AND A METHOD FOR MANUFACTURING THE RADIATION WINDOW STRUCTURE
(FR) STRUCTURE DE FENÊTRE DE RAYONNEMENT ET PROCÉDÉ DE FABRICATION DE LA STRUCTURE DE FENÊTRE DE RAYONNEMENT
Abstract: front page image
(EN) The invention relates to a radiation window structure. The radiation window structure comprising a substrate (102) made of silicon nitride and a coating layer (104) grown from a vapor phase on outer surface of the substrate (102). The invention also relates to a method for manufacturing a radiation window structure.
(FR) L'invention concerne une structure de fenêtre de rayonnement. La structure de fenêtre de rayonnement comprend un substrat (102) constitué de nitrure de silicium et une couche de revêtement (104) développée à partir d'une phase vapeur sur la surface externe du substrat (102). La présente invention concerne également un procédé de fabrication d'une structure de fenêtre de rayonnement.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)