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1. (WO2017156952) GAS-FLOW CONTROLLER FOR POLYSILICON REDUCING FURNACE

Pub. No.:    WO/2017/156952    International Application No.:    PCT/CN2016/091833
Publication Date: Fri Sep 22 01:59:59 CEST 2017 International Filing Date: Thu Jul 28 01:59:59 CEST 2016
IPC: C01B 33/03
Applicants: YAN, Lirong
严利容
Inventors: XU, Zhengqing
许正清
YANG, Ziqi
杨紫琪
WANG, Yong
王勇
Title: GAS-FLOW CONTROLLER FOR POLYSILICON REDUCING FURNACE
Abstract:
Provided is a gas-flow controller (2) for a polysilicon reducing furnace, the gas-flow controller comprising a cylinder (21) with an opening (22) and a seal cap (23) respectively disposed at the bottom end and the top end thereof. The wall of the cylinder (21) is provided with multiple through-holes (24), and the bottom end of the cylinder (21) is inserted and connected to an exhaust air outlet (102) disposed on a bottom plate (1) of the reducing furnace. The opening (22) is in fluid communication with the exhaust air outlet (102). The gas-flow controller (2) of the present invention changes the injection trajectory of a reactant gas and prolongs the dwell time in the reducing furnace of a gas having a lower injection rate, so as to achieve complete reaction of the gas and increase polysilicon yield. The gas-flow controller of the present invention can also avoid silicon slag from falling into the exhaust air outlet during polysilicon production.