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1. (WO2017156853) COPPER INTERCONNECT DEVICE HAVING EXPLOSION-PROOFING FUNCTION AND COPPER INTERCONNECT EXPLOSION-PROOFING METHOD

Pub. No.:    WO/2017/156853    International Application No.:    PCT/CN2016/081786
Publication Date: Fri Sep 22 01:59:59 CEST 2017 International Filing Date: Fri May 13 01:59:59 CEST 2016
IPC: H01L 21/3063
H01L 21/302
Applicants: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
深圳市华星光电技术有限公司
Inventors: LI, Jia
李嘉
Title: COPPER INTERCONNECT DEVICE HAVING EXPLOSION-PROOFING FUNCTION AND COPPER INTERCONNECT EXPLOSION-PROOFING METHOD
Abstract:
Disclosed are a copper interconnect device having an explosion-proofing function and a copper interconnect explosion-proofing method. The copper interconnect device comprises a reaction chamber (10), a container (20) disposed below the reaction chamber (10) and used to contain an etching liquid, a liquid inlet pipe (30), a return pipe (40), a temperature control unit (50), an automatic control unit (C), and a pump (M) on the liquid inlet pipe (30). Provided within the reaction chamber (10) is a spraying assembly (11) used to spray the liquid towards a substrate (S) therein. The liquid inlet pipe (30) and the return pipe (40) are simultaneously connected between the spraying assembly (11) and the container (20) respectively, and the liquid inlet pipe (30) is used to transport the liquid from the container (20) to the spraying assembly (11) by means of the pump (M). The temperature control unit (50) comprises a temperature sensor (51) disposed in the container (20) and used to detect in real time a temperature of the liquid within the container (20). The automatic control unit (C) is electrically connected to the temperature control unit (50), and controls the pump (M) to stop operation when the temperature of the liquid within the container (20) is higher than a predetermined temperature range (T0). The explosion-proof device and method of the present invention can prevent the explosion of a liquid container (20) in case of an abnormal temperature of the liquid, thereby guaranteeing the safety of an operator.