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1. (WO2017156342) CORRECTION OF FABRICATED SHAPES IN ADDITIVE MANUFACTURING

Pub. No.:    WO/2017/156342    International Application No.:    PCT/US2017/021686
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Fri Mar 10 00:59:59 CET 2017
IPC: H01L 21/306
H01L 21/304
H01L 21/321
Applicants: APPLIED MATERIALS, INC.
Inventors: YAMAMURA, Mayu Felicia
FUNG, Jason Garcheung
REDFIELD, Daniel
BAJAJ, Rajeev
NG, Hou T.
Title: CORRECTION OF FABRICATED SHAPES IN ADDITIVE MANUFACTURING
Abstract:
A method of fabricating a polishing pad using an additive manufacturing system includes receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection. The desired shape defines a profile including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern.