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|1. (WO2017155244) TILT MEASUREMENT SENSOR USING INTERFEROMETER|
|Applicants:||INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY
|Inventors:||CHO, Kyu Man
PARK, June Kyu
|Title:||TILT MEASUREMENT SENSOR USING INTERFEROMETER|
The present invention relates to a tilt measurement sensor using an interferometer. A tilt measurement sensor for measuring a tilt change angle with respect to an object having a mirror plane comprises: a light source; a first optical element configured to split a beam provided from the light source into a first beam and a second beam according to a polarization component and output the first beam and the second beam toward the mirror plane of an object as a parallel beam; a second optical element configured such that the first beam and the second beam reflected from the mirror plane of the object are incident on the second optical element as a parallel beam, and the incident first and second beams proceed in the same optical path; and an I/Q demodulator for demodulating the first beam and the second beam, which have an optical path difference by a slope change of the mirror plane of the object to detect and output an I output signal and a Q output signal for the first beam and the second beam, wherein the first beam and the second beam are configured to have the same optical path length, and the optical path difference is generated in the first beam and the second beam which emit the second optical element due to the slope change of the mirror plane. The tilt measurement sensor according to the present invention is a modification of a Mach-Zehnder interferometer. Since the tilt measurement sensor measures the angle of change using an optical path difference generated when the angle of a target mirror changes, it is possible to accurately measure the angle change of the target mirror without being affected by optical elements even when the optical elements are moved.