Search International and National Patent Collections
|1. (WO2017155081) PLANARIZING DEVICE|
|Applicants:||TOHO ENGINEERING CO.,LTD.
[Problem] To enable precise planarizing with a compact device without causing damage to a workpiece while also effectively suppressing the occurrence of vibrations during device activation. [Solution] This planarizing device is provided with a pair of planarizing units SP1, SP2 each equipped with: a holder 62 that holds the reverse side of a workpiece W; a drive motor 71 that, within the surface of the workpiece W, rotates the holder 62 about an axis intersecting said surface; a support plate 4 that holds a pad 5 and positions the surface of the pad 5 opposite the surface of the workpiece W; a linear guide 3 that enables reciprocating movement of the support plate 4 in a parallel direction to the surface of the pad 5 only in an amount that enables at least planarization by catalytic reaction; and a drive cylinder 72 that advances the holder 62 or the support plate 4 in a direction intersecting the surface of the workpiece W and the pad 5 so as to bring the surface of the workpiece W and the surface of the pad 5 close together or in mutual contact. The planarizing device is also provided with a main drive unit PD that reciprocates the support plates 4 of the planarizing units SP1, SP2 in mutually opposite phases upon the same straight line.