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1. (WO2017155081) PLANARIZING DEVICE

Pub. No.:    WO/2017/155081    International Application No.:    PCT/JP2017/009672
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Sat Mar 11 00:59:59 CET 2017
IPC: H01L 21/306
B24B 1/00
B24B 37/07
B24B 37/34
Applicants: TOHO ENGINEERING CO.,LTD.
東邦エンジニアリング株式会社
Inventors: SUZUKI Tatsutoshi
鈴木辰俊
SUZUKI Eisuke
鈴木英資
SUZUKI Daisuke
鈴木大介
Title: PLANARIZING DEVICE
Abstract:
[Problem] To enable precise planarizing with a compact device without causing damage to a workpiece while also effectively suppressing the occurrence of vibrations during device activation. [Solution] This planarizing device is provided with a pair of planarizing units SP1, SP2 each equipped with: a holder 62 that holds the reverse side of a workpiece W; a drive motor 71 that, within the surface of the workpiece W, rotates the holder 62 about an axis intersecting said surface; a support plate 4 that holds a pad 5 and positions the surface of the pad 5 opposite the surface of the workpiece W; a linear guide 3 that enables reciprocating movement of the support plate 4 in a parallel direction to the surface of the pad 5 only in an amount that enables at least planarization by catalytic reaction; and a drive cylinder 72 that advances the holder 62 or the support plate 4 in a direction intersecting the surface of the workpiece W and the pad 5 so as to bring the surface of the workpiece W and the surface of the pad 5 close together or in mutual contact. The planarizing device is also provided with a main drive unit PD that reciprocates the support plates 4 of the planarizing units SP1, SP2 in mutually opposite phases upon the same straight line.