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|1. (WO2017155075) CLEANING DEVICE AND CLEANING METHOD|
|Applicants:||BANDO CHEMICAL INDUSTRIES, LTD.
|Title:||CLEANING DEVICE AND CLEANING METHOD|
The present invention provides a cleaning device and a cleaning method that make it possible to efficiently remove both relatively large foreign matter and fine foreign matter from the surface of an object. The present invention is a cleaning device that conveys a plate-shaped or film-like object while removing foreign matter from the surface thereof, said cleaning device being characterized by the provision of: a first brush roller rotationally driven by a rotating shaft that is substantially perpendicular to the conveyance direction and substantially parallel to a conveyance surface; a cleaning roller rotationally driven by a rotating shaft that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface; a pair of facing rollers that face the first brush roller and the cleaning roller with the object therebetween and that are both rotationally driven in the forward direction with respect to the conveyance direction of the object; and one or more voltage application mechanisms that apply voltage to the first brush roller and the cleaning roller. The cleaning device is also characterized in that the voltage applied to the brush roller by the one or more voltage application mechanisms has a high absolute value and the same polarity as that applied to the cleaning roller.