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1. (WO2017154937) MIST GENERATING DEVICE, FILM FORMING DEVICE, MIST GENERATING METHOD, FILM FORMING METHOD, AND DEVICE MANUFACTURING METHOD

Pub. No.:    WO/2017/154937    International Application No.:    PCT/JP2017/009104
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Mar 08 00:59:59 CET 2017
IPC: B05B 17/06
B05D 1/02
B05D 1/06
B05D 1/32
B05D 3/10
B05D 5/12
B05D 7/24
G03F 7/20
H01B 13/00
H01L 21/027
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: NARA Kei
奈良圭
NISHI Yasutaka
西康孝
NAKAZUMI Makoto
中積誠
IWAHORI Koichiro
岩堀恒一郎
YAMADA Kentaro
山田研太郎
SUZUKI Ryoko
鈴木涼子
Title: MIST GENERATING DEVICE, FILM FORMING DEVICE, MIST GENERATING METHOD, FILM FORMING METHOD, AND DEVICE MANUFACTURING METHOD
Abstract:
A mist generating device (MG1) for generating a mist (MT) including fine particles (NP) is provided with: a container (30a) for retaining a dispersion liquid (DIL) including the fine particles (NP); a first oscillating part (32a) for imparting oscillation at a first frequency to the dispersion liquid (DIL) in the container (30a) and thereby suppressing aggregation of the fine particles (NP) in the dispersion liquid (DIL); and a second oscillating part (34a) for imparting, to the dispersion liquid (DIL) in the container (30a), oscillation at a second frequency higher than the first frequency to generate a mist (MT) including the fine particles (NP) from the surface of the dispersion liquid (DIL).