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1. (WO2017154895) MEASURING DEVICE, OBSERVING DEVICE AND MEASURING METHOD

Pub. No.:    WO/2017/154895    International Application No.:    PCT/JP2017/008972
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Mar 08 00:59:59 CET 2017
IPC: G01B 11/26
G01N 21/17
Applicants: HAMAMATSU PHOTONICS K.K.
浜松ホトニクス株式会社
Inventors: NAKAMURA Tomonori
中村 共則
Title: MEASURING DEVICE, OBSERVING DEVICE AND MEASURING METHOD
Abstract:
The present invention relates to a measuring device and the like provided with a construction for adjusting the inclination of an observation surface of a sample with respect to a reference plane orthogonal to the optical axis of an objective lens. This measuring device is provided with a scanner which is disposed on a propagation pathway of irradiating light traveling from a light source toward the sample, and which changes the exit angle of the irradiating light. While the scanner changes the exit angle of the irradiating light, the measuring device obtains a signal value of a detected signal of reflected light from the sample, and obtains sample inclination information by associating the irradiating light exit angle with the signal value.